22 May15:46pm
ToF-SIMS 5 Time-of-flight secondary-ion mass spectrometry system (ION TOF ).
•• Sensitivity < 100 ppm.
•• Lateral resolution ~ 100 nm (extension of surface area analyzed).
•• Depth resolution ~ 1 nm (thickness of surface analyzed).
•• Identification of molecules up to 10000 amu.
