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U8-E01. Chemical vapor deposition (CVD) equipment for growth of CNTs and Graphene, Black Magic Pro 4-inch System ( AIXTRON Ltd)

The CVD machine grows both single and multiwalled carbon nanotubes, using both plasma-enhanced CVD (PECVD) and/or thermal CVD. It enables the production of advanced CNT Micro-Nano-Bio Systems (MNBS) for biological, chemical or biochemical analysis. As the suitability of the interface of any MNBS device is a critical point, the selective growth of CNT improves the electrode-electrolyte interface enhancing the biomonitoring.
Its specifications are:
›› Heat processing control up to 900ºC, with controlled ramps of up to 300ºC/min.
›› Plasma control; completely configurable source. Possibility of working without plasma.
›› Camera for 4” wafers.
›› Camera for following the process.
›› Possibility of processes in high vacuum (5 mBar) and at atmospheric pressure (800 mBar).
›› Process gases: hydrogen, methane, acetylene, argon,
ammonium and air.

See

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U8-S02. Electrochemical and electrical characterization of the above mentioned microelectrodes (On-site&Remote) OUTSTANDING

Electrochemical and electrical characterization of the above mentioned microelectrodes (On-site&Remote) OUTSTANDING

Complete electrochemical and electrical characterization of microelectrode arrays in either rigid or flexible substrates.

Customer benefits

Adaptable platform for electrical characterization of microelectrodes to meet customer needs

Target customer

Research groups and SMEs

References

  • Guimerà A, Illa X et al., Biomed Microdevices 15 (2013) 849-858
  • Suarez-Perez A et al., Front Neurosci-Switz 12 (2018) 862
  • Capone C et al., Cereb Cortex 29 (2019) 319-335
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U8-S01. Design, fabrication and encapsulation of microelectrodes (based on gold or platinum) on different rigid (Si, SiC or Pyrex) or flexible polymeric substrates

Design, fabrication and encapsulation of microelectrodes (based on gold or platinum) on different rigid (Si, SiC or Pyrex) or flexible polymeric substrates

Design and fabrication of microelectrode arrays in either rigid or flexible substrates.

Customer benefits

  • Flexibility on design rules.
  • Short delivery times.

Target customer

Research groups and SMEs

References

  • Guimerà A, Illa X et al., Biomed Microdevices 15 (2013) 849-858
  • Suarez-Perez A et al., Front Neurosci-Switz 12 (2018) 862
  • Capone C et al., Cereb Cortex 29 (2019) 319-335
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U7-S10. Advising and consulting in micro and nanofabrication

Advising and consulting in micro and nanofabrication

The Advising and consulting in micro and nanofabrication service of U7, provides full support in the design of micro and nano fabrication processes for obtaining biomedical devices. We request deep information about the final application, technical needs, limitations, requirements, etc. and design, together with our clients, the best strategy for their fabrication projects.

Customer benefits

Our Advising and consulting in micro and nanofabrication service, benefits from being part of a bioengineering-specialized research centre, providing wide knowledge in the main applications and a large experience in the fabrication of biomedical devices in the field of bioengineering with different techniques and materials. We offer custom services, assuring close and direct interaction with the client, to meet conclusive results and high-quality needs.

Target customer

Our target customers are researchers in the field of bioengineering, or R&D departments of biotech companies which want to fabricate their custom biomedical prototypes or devices.

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U7-S09. Thin layer deposition

Thin layer deposition

The Thin Film Deposition service of U7, allows the integration of microelectronics in biomedical devices. Having four different deposition sources, being resistive evaporation, electron beam evaporation, DC sputtering and RF sputtering, this is a versatile equipment, due to the wide range of deposition techniques and materials available (Ti, Cr, Cu, Au, Al, ITO, SiOx and AlOx).

Customer benefits

Our Thin Film Deposition service benefits from being part of a bioengineering-specialized research centre, providing wide knowledge in the main applications of these methods and materials in the field of bioengineering. We offer custom services, assuring close and direct interaction with the client, to meet conclusive results and high-quality needs.

Target customer

Our target customers are researchers in the field of bioengineering and microelectronics, or R&D departments of biotech companies which want to test include microelectronics in their biomedical prototypes or devices.

Additional information

Imagen que contiene oscuro, verde, luz Descripción generada automáticamente
Sputtered gold electrodes (100 nm thick), on a cover slip glass substrate. Image given by Dr. Mònica Mir from the “Nanobioengineering group” at IBEC.

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U7-S08. Fabrication of Chromium masks

Fabrication of Chromium masks

The Chromium mask fabrication service of U7 allows obtaining 5 inches chromium photomasks, with resolution as small as 1 µm for UV photolithography processes. The fabrication of high-resolution photomasks in-house, allows to speed up critical processes requiring masking and to have direct assistance in design for the targeted application.

Customer benefits

Our Chromium mask fabrication service benefits from being part of a bioengineering-specialized research centre, providing wide knowledge in the main applications of these masks in the field of bioengineering, as well as the main techniques that require the use of these type of masks. We offer custom services, assuring close and direct interaction with the client, to meet conclusive results and high-quality needs.

Target customer

Our target customers are researchers in the field of bioengineering or R&D departments of biotech companies which want to test biomedical devices or microstructured surfaces with bioengineering applications.

Additional information


Cr Mask for the fabrication of microfluidic devices.

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U7-S07. Photolithography and soft-lithography manufacturing processes

Photolithography and soft-lithography manufacturing processes

The Photolithography and soft-lithography service of U7, provides full support and assistance in the fabrication of biomedical devices, from design to the final chip. Clean room conditions, lithography tools (optical) and a variety of biocompatible polymers (soft-lithography) are employed for the creation of biomedical devices, as microfluidic chips for cell culture, diagnostic systems, etc.

Customer benefits

Our Photolithography and soft-lithography service benefits from being part of a bioengineering-specialized research centre, providing wide knowledge in the main applications and a large experience in the fabrication of these devices in the field of bioengineering. We offer custom services, assuring close and direct interaction with the client, to meet conclusive results and high-quality needs.

Target customer

Our target customers are researchers in the field of bioengineering, or R&D departments of biotech companies which want to test their custom biomedical prototypes or devices.

Additional information


SU-8 mould on 4” silicon wafer and PDMS microfluidic chip, fabricated from the same silicon mould.

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U7-S06. NIL – Nanoimprint Lithography (On-site&Remote) SINGULAR

Replication of nanostructures on polymers using controlled pressure and temperature. The sructres can be cured by heat (Thermal NIL) or UV light (step-and-flash lithography – SFIL) during the imprinting process.
This technique is widely used for microstructure fabrication for electrical, optical, photonic and biological applications.

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U7-S04. Lytography by e-beam

Lytography by e-beam

An electron beam lithography service allows the fabrication of structures at the nanoscale. By using a combination of different type of electron-sensitive resists, a variety of surfaces with special interest in bioengineering can be processed locally, from metallic to insulators.

Customer benefits

Our electron beam lithography service allows our customers, to locally modify a surface at the nanoscale to study submicron systems.

Target customer

Our target customers are researchers in the field of bioengineering or R&D departments of biotech companies, which want to test models, perform proves of concept, prototypes, etc. at the submicron-scale.

Additional information

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U7-S03. Characterization by SEM

Characterization by SEM

The Scanning Electron Microscopy service of U7 is specialized in the high-resolution imaging of different samples in the bioengineering field. We can investigate surface morphology and topography of biological samples, polymeric structures and tissue, but also of semiconducting materials, inorganic heterostructures, etc. which are commonly related to biomedical devices and/or biomaterials. We provide advice in the preparation of the samples, as well as assistance in their characterization.

Customer benefits

Our SEM service benefits from being part of a bioengineering-specialized research centre, providing wide knowledge in the treatment and imaging of biological samples, devices and biomaterials. We offer custom services, assuring close and direct interaction with the client, to meet conclusive results and high-quality needs.

Target customer

Our target customers are researchers in the field of bioengineering or R&D departments of biotech companies which want to test, characterize, or compare different samples or prototypes.

Additional information

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